Title:
METHOD FOR MANUFACTURING CRYSTAL VIBRATION PIECE AND METHOD FOR MANUFACTURING CRYSTAL DEVICE
Document Type and Number:
Japanese Patent JP2014192646
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing a crystal vibration piece and a method for manufacturing a crystal device, capable of easily and highly accurately processing a vibration part.SOLUTION: A method for manufacturing a crystal vibration piece including a crystal vibration part which vibrates at a prescribed frequency and is formed into a prescribed shape comprises the steps of: coating a resist (171) on at least one surface of a crystal wafer (W110) formed on a first plane and on a second plane facing the first plane (S112); pressing a first stamper (172) in which a mold corresponding to the shape of the crystal vibration piece is formed against the crystal wafer on which the resist is coated (S113); exposing or heating the resist when the first stamper is being pressed (S114); and processing the resist and the crystal wafer by a dry etching method or by a blasting method using the resist pressed by the crystal wafer as a mask.
Inventors:
KIKUCHI KENICHI
Application Number:
JP2013065324A
Publication Date:
October 06, 2014
Filing Date:
March 27, 2013
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO
International Classes:
H03H3/02; H03H9/19
Attorney, Agent or Firm:
Nobukazu Ito
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