Title:
結晶性積層構造体の製造方法
Document Type and Number:
Japanese Patent JP7054850
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for industrially, advantageously manufacturing a laminated structure promoting crystal functional expression.SOLUTION: In the method for manufacturing a crystalline layer structure obtained by alternately laminating a high crystalline layer using a crystal including metal as a main component and a low crystalline layer having crystallinity lower than that of the high crystalline layer at least layer-by-layer so that each thickness of the high crystalline layer and the low crystalline layer is 1 μm or less and the high crystalline layer is thicker than the low crystalline layer. Crystal functional expression is promoted by performing the laminating by carrying mist or droplets obtained by atomizing or dropping a raw material solution with carrier gas and thermally reacting the mist or the droplets to form the high crystalline layer and the low crystalline layer.SELECTED DRAWING: None
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Inventors:
Shingo Yagyu
Toshimi Hitora
Toshimi Hitora
Application Number:
JP2017073298A
Publication Date:
April 15, 2022
Filing Date:
March 31, 2017
Export Citation:
Assignee:
Flosfia Co., Ltd.
International Classes:
C23C18/12
Domestic Patent References:
| JP2009120410A | ||||
| JP2016126988A | ||||
| JP2016146442A | ||||
| JP2014063973A | ||||
| JP2002088476A |