Title:
METHOD FOR MANUFACTURING DEVICE, METHOD FOR MANUFACTURING DISPLAY DEVICE, AND DISPLAY DEVICE AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2012222044
Kind Code:
A
Abstract:
To provide a method for manufacturing a device and a method for manufacturing a display device capable of improving a manufacturing yield in simple steps.
A step of forming a device (TFT layer 12) on a substrate 11 includes a step (S11) of forming a thin film, a step (S12) of forming a photoresist film on the thin film, a step (S13) of exposing the photoresist film using an exposure mask M1, and a step (S15) of etching the exposed photoresist film. The exposure step includes steps of continuously exposing the photoresist film several times (S131 and S132). These steps allow reduction in etching failures resulting from contamination of foreign matters and the like in a thin film pattern while suppressing an increase in manufacturing steps.
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Inventors:
KATO YUICHI
MASUDA KENTA
AKAMATSU KEIICHI
MASUDA KENTA
AKAMATSU KEIICHI
Application Number:
JP2011083832A
Publication Date:
November 12, 2012
Filing Date:
April 05, 2011
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L29/786; G02F1/1343; G02F1/1368; G02F1/167; G09F9/00; G09F9/30; H01L21/027; H01L21/336
Attorney, Agent or Firm:
Yoichiro Fujishima
Yasushi Santanzaki
Masao Hasebe
Takaaki Tanaami
Yasushi Santanzaki
Masao Hasebe
Takaaki Tanaami
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