Title:
誘電体酸化物膜の製造方法
Document Type and Number:
Japanese Patent JP4423835
Kind Code:
B2
Inventors:
Makoto Kuwabara
Satoshi Shindo
Satoshi Shindo
Application Number:
JP2002066700A
Publication Date:
March 03, 2010
Filing Date:
March 12, 2002
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
C01G23/00; H01B19/00; C25D9/08; H01B3/12; C25D13/02; H01B17/62
Domestic Patent References:
| JP2001026421A | ||||
| JP5043800B2 |