To provide a method of manufacturing a disc-shaped substrate hard to damage or break workpieces when the workpieces are pulled out from a shaft after grinding the outer circumferential surfaces of the workpieces.

In the method of manufacturing the disc-shaped substrate, the workpieces 10 whose inner circumferential surfaces are ground are inserted and laminated in the shaft 71, a shaft 76 having a smaller diameter compared with the shaft 71 is coaxially arranged below the shaft 71 after grinding the outer circumferential surfaces of the laminated workpieces 10, and the workpieces 10 are moved to the shaft 76 in a liquid tank 80 to which ultrasonic vibration is applied.