Title:
METHOD FOR MANUFACTURING DLC FILM
Document Type and Number:
Japanese Patent JP2007297698
Kind Code:
A
Abstract:
To provide a method for manufacturing a DLC (diamond-like carbon) film for depositing the DLC film on the surface of a substrate by sputtering.
The method for manufacturing the DLC film mainly uses the sputtering to deposit the DLC film on the surface of the substrates. The method includes the steps of: (a) providing a reaction chamber and fixing the substrate in the reaction chamber; (b) pumping the pressure of the reaction chamber below 10-6torr; (c) introducing at least a carbon-containing gas into the reaction chamber; and (d) depositing a DLC film on the substrate by sputtering a graphite target. The deposited DLC film is in a shape of flakes. The appearance of the deposited DLC film on the surface of the substrate is in a rose-like shape. Moreover, since the height of the deposited DLC film is of micrometer level and the thickness of the deposited DLC film is of nanometer level, the aspect ratio of the deposited flake-shaped DLC film is high, then, the deposited DLC film can enhance the field emission.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
RA KICHISHU
JENG JIAN-MIN
Application Number:
JP2006214607A
Publication Date:
November 15, 2007
Filing Date:
August 07, 2006
International Classes:
C23C14/06; C01B31/02; C23C14/34; H01J9/02
Domestic Patent References:
| JPS63190798A | 1988-08-08 | | | |
| JPH07224379A | 1995-08-22 | | | |
| JP2002327271A | 2002-11-15 | | | |
Attorney, Agent or Firm:
Matsuji Takemoto
Hideo Sugiyama
Koichi Yuda
Uozumi Takahiro
Naohiko Teshima
