Title:
METHOD OF MANUFACTURING FERROELECTRIC FILM
Document Type and Number:
Japanese Patent JP2016184677
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ferroelectric film capable of shortening edge rinse processing.SOLUTION: A method of manufacturing a ferroelectric film includes: a coating step of applying a ferroelectric material film on a substrate 11; a temporary baking step of temporarily baking the ferroelectric material film on the substrate; a crystallization step of performing heat treatment to the ferroelectric material film after the temporary baking step to form a ferroelectric film 12 crystallized on the substrate; and a step of supplying an aqueous solution for ferroelectric film dissolution to a rear face of the substrate while rotating the substrate after the crystallization step to clean the rear face of the substrate and to dissolve an edge of the ferroelectric film on the substrate.SELECTED DRAWING: Figure 2
Inventors:
KIJIMA TAKESHI
HAMADA YASUAKI
SATO KAZUHIRO
HAMADA YASUAKI
SATO KAZUHIRO
Application Number:
JP2015064422A
Publication Date:
October 20, 2016
Filing Date:
March 26, 2015
Export Citation:
Assignee:
YUUTEKKU:KK
International Classes:
H01L21/306; B05D3/02; B05D3/10; B05D5/12; H01B19/00; H01L21/308; H01L21/316
Domestic Patent References:
| JP2003158115A | 2003-05-30 | |||
| JP2001144067A | 2001-05-25 | |||
| JP2009016854A | 2009-01-22 | |||
| JP2002353182A | 2002-12-06 | |||
| JP2012004450A | 2012-01-05 |
Attorney, Agent or Firm:
Mutsumi Yanase
Atsushi Watanabe
Atsushi Watanabe