Title:
強誘電体膜の製造方法
Document Type and Number:
Japanese Patent JP5857341
Kind Code:
B2
Abstract:
To provide a method for manufacturing a ferroelectric film formed of a lead-free material. The method for manufacturing a ferroelectric film according to an aspect of the present invention is a method for manufacturing a ferroelectric film including the steps of pouring a sol-gel solution for forming (K1-XNaX)NbO3 into a mold 3, calcining the sol-gel solution to form a (K1-XNaX)NbO3 material film inside the mold 3, heat-treating and crystallizing the (K1-XNaX)NbO3 material film in an oxygen atmosphere to form a (K1-XNaX)NbO3 crystallized film inside the mold 3 and removing the mold 3 through etching, and is characterized in that the mold 3 is more easily etched than the (K1-XNaX)NbO3 crystallized film and the X satisfies a formula below 0.3≰X≰0.7.
Inventors:
Ken Kijima
Yuji Honda
Yuji Honda
Application Number:
JP2013526707A
Publication Date:
February 10, 2016
Filing Date:
July 29, 2011
Export Citation:
Assignee:
U-Tech Co., Ltd.
International Classes:
C01G33/00; C01G29/00; C01G41/00; H01B3/12
Domestic Patent References:
| JP2009010367A | ||||
| JP2007314378A | ||||
| JP2006279713A | ||||
| JP2002151754A |
Foreign References:
| WO2010122707A1 |
Attorney, Agent or Firm:
Mutsumi Yanase
Atsushi Watanabe
Atsushi Watanabe