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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING FIELD EMITTING WITH TIP POSITIONED AUTOMATICALLY
Document Type and Number:
Japanese Patent JP2003051247
Kind Code:
A
Abstract:

To provide an efficient and economical means to manufacture a field emitter tip within a laminated substrate.

The laminated substrate is pattern-molded, by using a standard photograph flat-plate technology and etching is applied, and a rectangular or a columnar column is formed on the upper part of the substrate, composed of conductive layer(s) and non-conducive layer(s). Next, the laminated substrate is exposed to an anisotropic etching medium. This anisotropic etching medium is one which is for removing its column, in order to generate a well (504) to penetrate the conductive layer(s) and the non-conductive layer(s) (204, 206, 208, 210) and for forming a conical or a pyramidal field emitter tip (506), in a silicon substrate immediately below the well (504). Lastly, a dielectric material is removed from a wall of the well, by using retreating etching. At an optional step, a thin metal coating can be sputtered on the surface of the silicon-based electric field emitter tip.


Inventors:
SCHULTE DONALD W
MCMAHON TERRY E
Application Number:
JP2002165464A
Publication Date:
February 21, 2003
Filing Date:
June 06, 2002
Export Citation:
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Assignee:
HEWLETT PACKARD CO
International Classes:
H01J3/02; H01J9/02; H01L21/027; (IPC1-7): H01J9/02; H01L21/027
Attorney, Agent or Firm:
Kaoru Furuya (3 outside)