To manufacture a fine structure having a metallic body having a uniform head part diameter by plating treatment while avoiding the effect of the variation of metal filling state in fine pores.
The method of manufacturing the fine structure 1 provided with a dielectric base material 2 having a plurality of fine pores 4 and the metallic body 9 which has a part filled in each fine pore 4 and a head part 9a projecting from each fine pore 4 and is sized enough to generate localized plasmon, includes: a step (A) of preparing the dielectric base material 2 having a plurality of the bottomed 4b fine pores 4 on the surface 2a; a step (B) of filling a metal 5 in the fine pores 4; a step (C) of depositing a metal 7 to become an electrode on the surface 2a of the dielectric base material 2; a step (D) of removing the dielectric base material 2 from the back surface 2b side of the dielectric base material 2 until the metal 5 filled in the bottomed 4b fine pores 4 is exposed; and a step (E) of forming a head part 9a having a diameter 9b larger than the pore diameter 4c of the fine pores 4 on the exposed part 5a by plating.
Go Sakuma
Keiichi Azuma
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