Title:
METHOD FOR MANUFACTURING FINE THREE-DIMENSIONAL STRUCTURE
Document Type and Number:
Japanese Patent JP2018094661
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing a fine three-dimensional structure, in which the height of a tip position of the fine three-dimensional structure can be designed with high precision.SOLUTION: A method for manufacturing a fine three-dimensional structure includes the steps of: preparing a substrate 10; forming a thin film material 11 with a tip 12 on the substrate 10; dividing the tip vicinity 13 of the thin film material into a first region 21 including the tip and a second region 22 neighboring the first region 21, and selectively infusing ion into the second region 22; and etching at least a substrate surface positioned below the tip vicinity 13 of the thin film material and forming the thin film material 11 into a cantilever beam structure, and thereby making the ion-infused second region 22 vertically solid-curved and making the first region 21 three-dimensional. A surface of the fine three-dimensional structure is covered with a covering material 50 as needed.SELECTED DRAWING: Figure 1
Inventors:
YOSHIDA TOMOYA
ATSUMI YUKI
SAKAKIBARA YOICHI
ATSUMI YUKI
SAKAKIBARA YOICHI
Application Number:
JP2016240376A
Publication Date:
June 21, 2018
Filing Date:
December 12, 2016
Export Citation:
Assignee:
AIST
International Classes:
B81C1/00; G01R1/067; G01R1/073
Attorney, Agent or Firm:
Haruki Uchino
Masako Uchino
Masako Uchino