Title:
METHOD OF MANUFACTURING FLEXIBLE DEVICE AND APPARATUS FOR MANUFACTURING FLEXIBLE DEVICE
Document Type and Number:
Japanese Patent JP2017212135
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a flexible device and an apparatus for manufacturing a flexible device, capable of improving yield in manufacturing.SOLUTION: In a method of manufacturing a flexible device, a first surface of a support substrate that has the first surface and a second surface facing to each other is bonded to the rear face of a flexible substrate, an element layer is formed on the front face of the flexible substrate, and the support substrate is peeled off from the flexible substrate by obliquely irradiating a laser beam from multiple directions, from a second surface side of the support substrate toward the vicinity of the interface between the support substrate and the flexible substrate.SELECTED DRAWING: Figure 12
Inventors:
KINOSHITA CHIHO
Application Number:
JP2016105262A
Publication Date:
November 30, 2017
Filing Date:
May 26, 2016
Export Citation:
Assignee:
JOLED INC
International Classes:
H05B33/10; G09F9/00; H01L51/50; H05B33/02
Attorney, Agent or Firm:
Patent Business Corporation Tsubasa International Patent Office
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