METHOD OF MANUFACTURING HEAT TRANSFER MEMBER, METHOD OF MANUFACTURING HEAT TRANSFER COMPONENT, HEAT TRANSFER MEMBER, AND HEAT TRANSFER COMPONENT

Title:

METHOD OF MANUFACTURING HEAT TRANSFER MEMBER, METHOD OF MANUFACTURING HEAT TRANSFER COMPONENT, HEAT TRANSFER MEMBER, AND HEAT TRANSFER COMPONENT

Document Type and Number:

Japanese Patent JP2014088978

Kind Code:

A

Abstract:

To provide a heat transfer member of small local variation of heat transfer performance on a heat transfer face and having uniform heat transfer characteristic.

A method of manufacturing a heat transfer member by processing a plate material 8 and disposing the same on a surface of a heat transfer component to be used as the heat transfer member, includes: a hole forming step for forming a plurality of holes 9 having a prescribed diameter on the plate material 8, and a groove forming step for forming a groove 11 on the plate material 8. The groove 11 is formed in a state that it has a recessed portion on a face kept into contact with the heat transfer component of the plate material 8, and the hole 9 is positioned on a bottom surface of the groove 11.

Inventors:

KIKKO DAIGO
KOMITA HIDEO
SUGAWARA RYOICHI
SATO NOZOMI

Application Number:

JP2012238089A

Publication Date:

May 15, 2014

Filing Date:

October 29, 2012

Export Citation:

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Assignee:

TOSHIBA CORP

International Classes:

F28F1/40; F28F3/06; H01L23/36; H01L23/427; H05K7/20

Attorney, Agent or Firm:

Patent business corporation Tokyo International Patent Office

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