To provide a method of manufacturing a high frequency inductor capable of preventing damage on an electrode and degradation in the characteristics of a product.
The method of manufacturing a high frequency inductor includes a step for forming a primary coil required for manufacturing a high frequency inductor on a wafer, a step for coating the wafer on which the primary coil is formed with primary PSV, a step for forming a secondary coil after coating of the primary PSV, a step of coating a secondary PSV after forming the secondary coil, a step for forming a barrier layer 340 at a part of the exposed electrode of a high frequency inductor after coating of a secondary PSV, a step for filling an insulating resin 350 on the wafer after forming a barrier layer and then curing the resin, and a step for exposing an electrode 330 by polishing the resin thus cured down to the barrier layer.
| JPS58101405 | MANUFACTURE OF INDUCTOR |
| WO/2007/136288 | METHOD FOR WINDING A HIGH-FREQUENCY SUPPLY TRANSFORMER |
| JP2019068047 | COIL COMPONENT AND METHOD OF MANUFACTURING THE SAME |
YU YON-SUK
LEE JONG YUN
KWON YONG-DO
WI SEUNG GWON
| JP2001244372A | 2001-09-07 | |||
| JPH09504909A | 1997-05-13 | |||
| JP2011091097A | 2011-05-06 | |||
| JP2012104673A | 2012-05-31 | |||
| JP2011071457A | 2011-04-07 | |||
| JP2009253233A | 2009-10-29 | |||
| JP2007073611A | 2007-03-22 | |||
| JPH06216096A | 1994-08-05 |
Fukukawa Shinya