To provide a method of manufacturing a hollow structure which enables a fine hollow structure having openings on both upper and lower sides to be formed stably and rapidly in a single process of forming the hollow structure.
In Fig.1, (a) a material 3 prepared by adding a surfactant to an unhardened UV-curable resin is applied onto the first substrate 4 arranged with two or more concave parts 5 by e.g. a slit-coating or spin-coating method, and the pressure of the surroundings is reduced. (b) A fine honeycomb-like hollow structure is formed by expanding the gas of the hollow parts through the pressure of the gas held between the concave parts 5 and the UV-curable resin so as to cause the UV-curable resin covering the hollow parts to extend in the direction perpendicular to the surface of the substrate while parts of the UV-curable resin regulate mutually. (c) The resin of division walls erecting vertically on the substrate of the fine hollow structure can be hardened selectively by using a UV drawing device capable of irradiating selectively with UV rays as a selective hardening means 2. (d) Being not hardened, the ceiling parts of the hollow structure are to serve openings.
INOUE YUKIE
OGAKI TAKASHI
AOKI SHINJI
SENOO SHINYA
MASUZAWA MASAHIRO
OSHIMA HISAYOSHI
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