METHOD OF MANUFACTURING HYPERFINE PERIODIC STRUCTURE

Title:

METHOD OF MANUFACTURING HYPERFINE PERIODIC STRUCTURE

Document Type and Number:

Japanese Patent JP3639840

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a method of manufacturing a hyperfine periodic structure capable of realizing an atomic level periodic structure with enough accuracy.
SOLUTION: A two-dimensional interference image is formed on the surface of a substrate by projecting either coherent radiation beams, laser beams, or coherent electron beams on the surface of a substrate 7 from a plurality of directions and a material 24 produced through a reaction of material molecules or material atoms by projecting material molecules or material atoms is selectively deposited on only the position of the above two-dimensional coherent image on the substrate 7.

More Like This:

JP2001250779	PROCESS MARGIN DETERMINATION METHOD OF SUBSTRATE TREATING DEVICE, AND SUBSTRATE TREATMENT METHOD USING THE SAME
JP3334162	VACUUM TREATMENT DEVICE AND FILM FORMING METHOD AND FILM FORMING DEVICE USING THIS DEVICE
JP4668222	Semiconductor device manufacturing system and semiconductor device manufacturing method

Inventors:

Mei Nishi Yasu
Shigeru Imai

Application Number:

JP371298A

Publication Date:

April 20, 2005

Filing Date:

January 12, 1998

Export Citation:

Click for automatic bibliography generation Help

Assignee:

School corporation Ritsumeikan

International Classes:

H01L21/285; H01L21/205; H01L21/302; H01L21/31; (IPC1-7): H01L21/302

Domestic Patent References:

JP786613A
JP6163365A
JP57104930A
JP6218709A
JP7221027A
JP43423A

Attorney, Agent or Firm:

Mitsuhiko Watanabe

Previous Patent: スペクトラム拡散方式の通信装置、及び、その高速同期確立法

Next Patent: CALL COLLECT TELEPHONE SERVICE METHOD AND SYSTEM USING INTERNET