Title:
積層体の製造方法
Document Type and Number:
Japanese Patent JP6428095
Kind Code:
B2
Inventors:
Takanobu Suzuki
Jun Matsui
Jun Matsui
Application Number:
JP2014195465A
Publication Date:
November 28, 2018
Filing Date:
September 25, 2014
Export Citation:
Assignee:
Mitsubishi Chemical Corporation
International Classes:
B32B37/00; B32B27/00; B32B27/16; B32B27/18; H01L33/50
Domestic Patent References:
| JP2011102004A | ||||
| JP2012153129A | ||||
| JP9314754A | ||||
| JP2011116809A |
Attorney, Agent or Firm:
Tsuyoshi Shigeno
Takayuki Shigeno
Takayuki Shigeno