To provide a method for manufacturing a liquid ejecting head having piezoelectric elements that provide favorable and constant displacement charcteristics with improved crystallinity of the piezoelectric layer, and a method for forming the piezoelectric element.
The method includes: a step of forming a first electrode film 60 on a flow channel substrate wafer 110; a step of forming a first ferroelectric film 71a on the first electrode film; a step of etching the first ferroelectric film 71a and the first electrode film 60 with a resist film formed on the first ferroelectric film 71a as the mask; a first removal step of removing the resist film by ashing with oxygen plasma; a step of forming a protective resist; a second removal step of ultimately removing the resist film and the protective resist film by treatment with an organic remover; a step of forming additional ferroelectric films; and a step of forming a second electrode film on the piezoelectric layer, and then shaping the second electrode film and the ferroelectric films into a certain pattern to form the piezoelectric elements.
Osamu Suzawa
Kazuhiko Miyasaka