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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING LIQUID JET HEAD
Document Type and Number:
Japanese Patent JP2011207072
Kind Code:
A
Abstract:

To provide a method for manufacturing a liquid jet head in which an adhesive reservoir is prevented from forming therein to achieve an improvement in yield.

The method includes: a step of forming a pressure generating element 300 on a first wafer 110; a step of joining the first wafer 110 to a second wafer 130 by means of an adhesive 35 to form a joined body 250; a step of wet-etching the first wafer 110 to form channels for a pressure generating chamber 12, etc.; and a step of dividing the joined body 250 into a plurality of chips in a predetermined size. The method also includes, prior to the step of forming the joined body 250, a step of forming, in the outer periphery of the joining surface of at least either of the first wafer 110 or the second wafer 130, a recessed part for a surplus of the adhesive 35 to be flowed therein.


Inventors:
MITSUI HIROYUKI
Application Number:
JP2010077506A
Publication Date:
October 20, 2011
Filing Date:
March 30, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/16; B41J2/055; B41J2/14; H01L41/09; H01L41/22
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka