Title:
磁気ディスク基板の製造方法、研磨用組成物および研磨方法
Document Type and Number:
Japanese Patent JP7292923
Kind Code:
B2
Abstract:
To provide a manufacturing method of a magnetic disk substrate having an improved edge shape while exhibiting good polishing performance.SOLUTION: A manufacturing method of a magnetic disk substrate is provided. This manufacturing method includes a step (1) of supplying a composition for polishing containing silica particles S as abrasive grains and water to a polishing target substrate and polishing the polishing target substrate using a polishing pad. Here, a compressive elastic modulus of the polishing pad is larger than 50%. In addition, the composition for polishing further contains a phosphorus-based extreme pressure agent.SELECTED DRAWING: None
Inventors:
Kazumasa Sato
Yasushi Matsunami
Noritaka Yokomichi
Yasushi Matsunami
Noritaka Yokomichi
Application Number:
JP2019066617A
Publication Date:
June 19, 2023
Filing Date:
March 29, 2019
Export Citation:
Assignee:
Fujimi Incorporated Co., Ltd.
International Classes:
G11B5/84; B24B1/00; B24B37/00; B24B37/24; C09G1/02; C09K3/14; G11B5/73
Domestic Patent References:
| JP2006077127A | ||||
| JP2017213660A | ||||
| JP2017025295A | ||||
| JP2017062864A |
Foreign References:
| WO2017094592A1 |
Attorney, Agent or Firm:
Makoto Abe
Michiko Oi
Masafumi Tani
Michiko Oi
Masafumi Tani