Title:
METHOD OF MANUFACTURING MAGNETIC LEAD SWITCH
Document Type and Number:
Japanese Patent JP2016177989
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin and compact type magnetic lead switch by processing a laminate having an SOI structure.SOLUTION: A first anchor layer 4a and a second anchor layer 4b of silicon oxide layers are formed on a silicon substrate 2, and a silicon layer 11 is bonded onto the first anchor layer 4a and the second anchor layer 4b, and a plating base layer 12 is formed on the silicon layer 11. The plating base layer 12 and the silicon layer 11 are processed to form a first fixed layer 5, a movable layer 7 and a second fixed layer 6. A magnetic material layer 13 is formed on the silicon layer 11 at a movable electrode portion 7b as a part of the movable layer 7 by plating. A magnetic material layer 13 is processed on the silicon layer 11 at the fixed electrode layer 6b as a part of the second fixed electrode layer 6b by plating.SELECTED DRAWING: Figure 4
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Inventors:
SATO KIYOSHI
KIKUIRI KATSUYA
KIKUIRI KATSUYA
Application Number:
JP2015057218A
Publication Date:
October 06, 2016
Filing Date:
March 20, 2015
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD
International Classes:
H01H11/00
Domestic Patent References:
| JPH06223686A | 1994-08-12 | |||
| JP2003311693A | 2003-11-05 | |||
| JP2001076599A | 2001-03-23 | |||
| JP2008243450A | 2008-10-09 | |||
| JP2000164890A | 2000-06-16 |
Attorney, Agent or Firm:
野▲崎▼ 照夫
Iwao Hirayama
Masahiro Matsushita
Katsuyuki Okubo
Iwao Hirayama
Masahiro Matsushita
Katsuyuki Okubo