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Title:
METHOD OF MANUFACTURING MAGNETIC SENSOR AND LEAD FRAME
Document Type and Number:
Japanese Patent JP3823953
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a magnetic sensor manufacturing method that realizes correct measurement of three-dimensional orientation of an external magnetic field and reduction in manufacturing costs.
SOLUTION: The magnetic sensor manufacturing method comprises steps of: preparing a lead frame 10 having at least two stage units 6, 7, a frame unit 9 provided with lead frames 4, 12-14 which are placed around the stage unit 6, 7, and coupling units 12, 13 for coupling these; plastically deforming the coupling units 12, 13 to slant the stage units 6, 7; pressing the stage units 6, 7 while the frame unit 9 is fixed for elastically deforming the coupling units 12, 13; adhering magnetic sensor chips 2, 3 to the stage units 6, 7 while arranging the stage units 6, 7 and a frame unit 9 substantially on the same plane; wiring the magnetic sensor chips 2, 3 to the lead 4; and releasing the stage units 6, 7 to allow the coupling units 12, 13 to recover from the elastic deformation.


Inventors:
Kenichi Shirasaka
Application Number:
JP2003202103A
Publication Date:
September 20, 2006
Filing Date:
July 25, 2003
Export Citation:
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Assignee:
Yamaha Corporation
International Classes:
G01R33/02; H01L23/50; (IPC1-7): H01L23/50
Domestic Patent References:
JP6236959A
JP8070087A
JP2002043492A
JP9257511A
JP9236616A
JP2002156204A
JP4302406A
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe