To provide a method for manufacturing a magneto-optical recording medium capable of manufacturing the magneto-optical recording medium of high recording density using magnetic super high resolution technology with high mass productivity, and further provide a sputtering system.
The method for manufacturing the magneto-optical recording medium having a first process of disposing a plurality of targets 7a and 7b composed of materials different from each other and a sheet of substrate 4 opposite to each other and a second process of forming a magneto-optical recording layer composed of a magnetic material on the substrate by rotating the substrate without moving the substrate and performing sputtering while independently applying voltages to the plurality of targets and the sputtering system 1 used for the same are provided.
MIYATA KAZUTOMO
WATANABE MAKOTO
