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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING MEMS SENSOR
Document Type and Number:
Japanese Patent JP2019005853
Kind Code:
A
Inventors:
KINOSHITA MASAHARU
ISOBE ATSUSHI
ONO KAZUO
SAKUMA NORIYUKI
SEKIGUCHI TOMONORI
WATANABE KEIJI
Application Number:
JP2017123905A
Publication Date:
January 17, 2019
Filing Date:
June 26, 2017
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
B81C1/00; H01J37/317; H04R19/00; H04R31/00
Attorney, Agent or Firm:
特許業務法人筒井国際特許事務所