Title:
METHOD OF MANUFACTURING METAL LAMINATED STRUCTURE
Document Type and Number:
Japanese Patent JP2011011366
Kind Code:
A
Abstract:
To provide a metal laminated structure allowing thinning and efficient manufacturing, and a method of manufacturing the metal laminated structure.
The metal laminated structure includes first, second and third metal layers. The first metal layer is formed on one surface of the second metal layer, and the third metal layer is formed on the other surface of the second metal layer. The first metal layer contains tungsten and/or molybdenum, the second metal layer contains copper, and the third metal layer contains tungsten and/or molybdenum. The method of manufacturing the metal laminated structure is also provided.
Inventors:
NITTA KOJI
MASHIMA MASATOSHI
INASAWA SHINJI
ABE YUGAKU
YOKOYAMA HIROSHI
SUWATA OSAMU
YAMAGATA SHINICHI
MASHIMA MASATOSHI
INASAWA SHINJI
ABE YUGAKU
YOKOYAMA HIROSHI
SUWATA OSAMU
YAMAGATA SHINICHI
Application Number:
JP2009155159A
Publication Date:
January 20, 2011
Filing Date:
June 30, 2009
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
ALLIED MAT CORP
ALLIED MAT CORP
International Classes:
C25D3/66; B32B15/01; C25D5/10; C25D7/00; C25D7/06; H01L23/373; H01L33/62; H01L33/64
Domestic Patent References:
| JPH11284111A | 1999-10-15 | |||
| JP2007327081A | 2007-12-20 | |||
| JP2004249589A | 2004-09-09 | |||
| JP2006100640A | 2006-04-13 | |||
| JP2000124370A | 2000-04-28 | |||
| JPH04230063A | 1992-08-19 | |||
| JPH06268115A | 1994-09-22 | |||
| JP2007227458A | 2007-09-06 |
Foreign References:
| WO2008013279A1 | 2008-01-31 | |||
| WO2007046164A1 | 2007-04-26 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
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