To provide a method for manufacturing a metallic microstructure, which manufactures a structural body superior in mechanical strength, simplifies the manufacturing process, while reducing costs.
In the method for manufacturing the metallic microstructure, a light shielding film 13 is disposed between laminated resist films 12 and 14 so as to prevent a lower resist film 12 from being influenced by exposure of an upper resist film 14. After the exposure step for all of the resist films 12 and 14 is completed, development of the resist films 12 and 14 is collectively performed so that a three-dimensional void 15 is formed. Thereafter, a plating film 16 is formed which is turned to the metallic microstructure by depositing a metal inside the void 15 by electroforming.
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