To provide a method for manufacturing a planar or three-dimensional thin film structural body having a microcrystal material or a material having amorphous and microcrystal parts gradiently existing.
An amorphous thin film is formed by a composition having a supercooled liquid region and a film forming condition to form an amorphous thin film structural body. The amorphous thin film structural body is maintained in a prescribed structure and heat treatment to generate microcrystal is performed to manufacture the microcrystal thin film structural body. By using a heating and holding method to generate thermal gradient, the microcrystal thin film structural body having specific solute part and the microcrystal part gradiently existing is manufactured.
HATA SEIICHI
SAKURAI JUNPEI
