To provide a method for manufacturing a microstructure having high shape precision.
According to one embodiment, a method for manufacturing a microstructure includes: a step of forming a guide film on a workpiece; a step of forming a cured film by applying a solution to cover the workpiece and the guide film, by separating the solution into a hydrophobic block where a hydrophobic portion is massed and a hydrophilic block where a hydrophilic portion is massed, and by curing the solution; a step of forming a mask member by removing the hydrophilic block from the cured film; and a step of performing processing of the workpiece using the mask member as a mask. An opening is made in the guide film. An upper surface of the guide film is hydrophilic, whereas a side surface of the opening is hydrophobic. The solution contains an amphiphilic polymer having the hydrophobic portion and the hydrophilic portion. A length of the hydrophobic portion is longer than a length of the hydrophilic portion.
MIZUSHIMA ICHIRO