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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING MICROSTRUCTURE
Document Type and Number:
Japanese Patent JP2013075984
Kind Code:
A
Abstract:

To provide a method for manufacturing a microstructure having high shape precision.

According to one embodiment, a method for manufacturing a microstructure includes: a step of forming a guide film on a workpiece; a step of forming a cured film by applying a solution to cover the workpiece and the guide film, by separating the solution into a hydrophobic block where a hydrophobic portion is massed and a hydrophilic block where a hydrophilic portion is massed, and by curing the solution; a step of forming a mask member by removing the hydrophilic block from the cured film; and a step of performing processing of the workpiece using the mask member as a mask. An opening is made in the guide film. An upper surface of the guide film is hydrophilic, whereas a side surface of the opening is hydrophobic. The solution contains an amphiphilic polymer having the hydrophobic portion and the hydrophilic portion. A length of the hydrophobic portion is longer than a length of the hydrophilic portion.


Inventors:
WATANABE KATSURA
MIZUSHIMA ICHIRO
Application Number:
JP2011216656A
Publication Date:
April 25, 2013
Filing Date:
September 30, 2011
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
C09D153/00; B81C1/00; C09D109/00; C09D123/16; C09D125/06; C09D129/10; C09D133/12; C09D171/02
Attorney, Agent or Firm:
Masahiko Hinataji