To provide a method of manufacturing a minute structure capable of easily manufacturing minute structures each formed of a metal or metal oxide by being regularly arranged on a conductive substrate, and to provide a complex obtained by using the method.
An organic film 12 is formed on a conductive substrate 13, and a solution prepared by dissolving a block copolymer (1) represented by a specific general formula (1) in a solvent is applied onto the organic film 12 to form an amphiphilic block copolymer film 11. Next, heat treatment is performed to the conductive substrate 13 formed with the organic film 12 and the amphiphilic block copolymer film 11 to subject the inside of the amphiphilic block copolymer film 11 to phase separation into a hydrophilic phase and a hydrophobic phase to form a phase separation structure film 14. Thereafter, an electrolytic plating treatment is performed to the conductive substrate 12. Thereby, a minute structure 16 formed of a metal or metal oxide is formed at the position of the hydrophilic phase 15 of the phase separation structure film 14. After the electrolytic plating, a step of removing only the phase separation structure film 14 may be further performed.
YADA TOMOKAZU
TOKYO INST TECH
| JP2004124088A | 2004-04-22 | |||
| JP2005314526A | 2005-11-10 | |||
| JP2007125665A | 2007-05-24 | |||
| JP2006150536A | 2006-06-15 | |||
| JP2004124088A | 2004-04-22 | |||
| JP2005314526A | 2005-11-10 | |||
| JP2007125665A | 2007-05-24 | |||
| JP2006150536A | 2006-06-15 |
Masatake Shiga
Tadashi Takahashi
Shunsuke Fushimi