To form a multi-layer three-dimensional structure by electrodepositing both of a structural material and a sacrificial material on a substrate.

A method for manufacturing the multi-layer three-dimensional structure includes the steps of: bringing the substrate 2 to be plated into contact with a first article 4a which includes a mask 6 and a support 8; depositing a first metal 12 (for instance, sacrificial metal) on the substrate in the presence of a first metal ion source; bringing the substrate 2 into contact with a second article 14 which includes a mask 16 and a support 18; depositing a second metal 20 (for instance, structural metal) on the substrate in the presence of a second metal ion source; and planarizing the layer. The method is repeated by using electroplating articles 4a, 4b, 14a and 14b, which have different patterns, to produce a multi-layer structure 24. An element 26 is obtained by etching all of the sacrificial metal 12.