To provide a method of manufacturing multilayered ceramic substrates which causes no division defect when taking out a plurality of multilayered ceramic substrates by dividing a multilayered assembled substrate and also is excellent in handleability.
A green composite laminated body is prepared by holding both upper and lower main surfaces of a green multilayered assembled substrate containing ceramic insulating material powder between shrinkage-suppressing layers containing inorganic material powder which is not sintered at a sintering temperature of the ceramic insulating material powder. Notched grooves are disposed on one main surface of the green composite laminated body in such a depth as to penetrate one side shrinkage-suppressing layer and the green multilayered assembled substrate, to reach the other side shrinkage-suppressing layer and not to reach the other side main surface of the green composite layered body. The green composite laminated body in which the green multilayered assembled substrate is integrated with the other side shrinkage-suppressing layer is calcined under such a condition that the inorganic material powder is not sintered although the ceramic insulating material powder is sintered and, thereafter, the plurality of multilayered ceramic substrates divided along the notched grooves by removing the shrinkage-suppressing layer are taken out from the multilayered assembled substrate after sintering which is integrated with the shrinkage-suppressing layer.
SAITO YOSHIFUMI
JPS60169126A | 1985-09-02 | |||
JP2003246680A | 2003-09-02 | |||
JP2002043575A | 2002-02-08 | |||
JPS60186010A | 1985-09-21 | |||
JP2002043757A | 2002-02-08 |