To provide a method for manufacturing a nanocarbon material composite substrate, by which a nanocarbon material can be patterned and grown on a substrate surface.

In the method for manufacturing the nanocarbon material composite substrate, a plurality of fine particles are arrayed on a substrate surface so as to grow a nanocarbon material through gaps among the fine particles. When the plurality of fine particles are arranged on a substrate surface, the fine particles are arrayed in a self-aligning manner according to the particle size, and thereby, the nanocarbon material grown through the gaps among the fine particles grows while patterned on the substrate surface.