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Title:
METHOD FOR MANUFACTURING OPTICAL ELEMENT ARRAY, OPTICAL ELEMENT ARRAY, AND OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP2009223250
Kind Code:
A
Abstract:

To provide a method for manufacturing an optical element array by which an optical element having a small height difference is easily and accurately formed.

In the method, the optical element array 10 is manufactured by providing a photoresist layer 15 on optical base material 11, forming a rugged shape part 21 on a surface of the photoresist layer 15 by exposing and developing the photoresist layer 15, and etching the photoresist layer 15 and the optical base material 11, thereby forming the optical element 13 having shape in accordance with the rugged shape part 21 on a surface of the optical base material 11. By carrying out etching after a selection ratio of the photoresist layer 15 to the optical base material 10 is adjusted to be under 1, the optical element 13 having the height difference smaller than that of the rugged shape part 21 is formed.


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Inventors:
OKURA HAJIME
ARAI YOSHIHISA
AOYANAGI KAZUNORI
Application Number:
JP2008070635A
Publication Date:
October 01, 2009
Filing Date:
March 19, 2008
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B3/00; B81B1/00; B81C1/00; G03F7/40; H01L21/3065
Domestic Patent References:
JP2003149596A2003-05-21
JP2001174607A2001-06-29
JP2004207286A2004-07-22
JP2001141906A2001-05-25
JP2007286113A2007-11-01
JP2002049326A2002-02-15
Attorney, Agent or Firm:
Hiroshi Sano
Akio Ishii



 
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