To provide a method of manufacturing optical elements, with which the thickness of a multilayered film formed on the surface of a substrate is made uniform and optical elements becoming defective products can be reduced.

A sacrifice layer 2 is formed on a substrate 1 for holding (a), and a multilayered film 3 is formed on the sacrifice layer 2 (b), and an adhesive layer 4 is formed on the multilayered film 3 (c), and the multilayered film 3 and the substrate 5 are adhered to each other across the adhesive layer(d), and then cuts 6 of prescribed shapes are provided on a laminated body formed by these steps, from the side of the substrate 5 up to the sacrifice layer 2 (e), and the sacrifice layer 2 is dissolved to obtain an optical element 7 (f).