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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JP2010243371
Kind Code:
A
Abstract:

To efficiently manufacture an optical element with a target form under the pressure environment during the use of it which is different from that during the manufacture of it.

A method for working an optical member under a first atmospheric pressure to manufacture an optical element used under a second atmospheric pressure that is different from the first one includes the measurement process for measuring the surface contour of the optical member under the first atmospheric pressure, the calculation process for calculating the deformation quantity of the optical member generated by the difference in atmospheric pressure between the first and second ones, and the work process for working the optical member under the first atmospheric pressure so as to make the surface contour of it the target form under the second atmospheric pressure on the basis of the surface contour measured in the measurement process and the deformation quantity calculated in the calculation process.


Inventors:
FUJII HIROFUMI
KATSUTA TAKESHI
HASHIGUCHI HIDENORI
Application Number:
JP2009093401A
Publication Date:
October 28, 2010
Filing Date:
April 07, 2009
Export Citation:
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Assignee:
CANON KK
International Classes:
G21K1/06; G01M11/00; G02B3/00; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu