Title:
METHOD OF MANUFACTURING OPTICALLY ADJUSTABLE REFLECTION PREVENTION COATING
Document Type and Number:
Japanese Patent JP2008098631
Kind Code:
A
Abstract:
To provide a method and a system for changing optical characteristics in an adjustable resist usable for manufacturing an electron device such as an integrated circuit.
The method and the system for improving precision in measurement using optical measurement are provided. Further the method and the system using an adjustable resist layer are provided. The adjustable resist layer provides first and second sets of optical characteristics before and after exposure, respectively.
Inventors:
WILLIS JAMES E
KLEKOTKA JAMES E
KLEKOTKA JAMES E
Application Number:
JP2007245158A
Publication Date:
April 24, 2008
Filing Date:
September 21, 2007
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/027; G03F7/039; G03F7/11; G03F7/26
Domestic Patent References:
| JPH118248A | 1999-01-12 | |||
| JP2008085330A | 2008-04-10 | |||
| JP2008098628A | 2008-04-24 | |||
| JP2008085332A | 2008-04-10 | |||
| JP2002014053A | 2002-01-18 |
Foreign References:
| US7175966B2 | 2007-02-13 |
Attorney, Agent or Firm:
Tadahiko Ito
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