Title:
METHOD OF MANUFACTURING ORGANIC EL DISPLAY
Document Type and Number:
Japanese Patent JP3748827
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL display having high manufacturing yield.
SOLUTION: A pixel electrode, a first capacitor (C) electrode, a first/second source/drain (SD) electrode on a pixel region and a first/second type SD electrode on a non-pixel region are formed from a transparent material layer, and a first metal (M) layer on a substrate, a first/second semiconductor (S) layer between the first/second SD electrodes and a first/second S layer between the first and the second type SD electrodes are respectively formed and a first type gate electrode, a second 2C electrode and a first impurity shielding (IS) layer are formed from a second M layer deposited on all the surface of the substrate. Then, a first/second 2SD regions and a first type SD region are respectively formed on both the terminals of the first/second 2S layer and the first type S layer by ion implantation of a first conductive impurity (I), a second 2IS layer is formed on all the surface of the substrate, and a second type gate electrode is formed from one part of the first/second 2IS layer. Then, the second type SD regions are formed on both the terminals of the second type S layer by the ion implantation of a second conductive I, and an organic light-emitting layer is formed on the exposed part of the pixel electrode.
Inventors:
Hiroshi Zhang
Application Number:
JP2002059218A
Publication Date:
February 22, 2006
Filing Date:
March 05, 2002
Export Citation:
Assignee:
SAMSUNG SDI Co., LTD.
International Classes:
G09F9/30; H05B33/10; G09F9/00; H01L21/336; H01L21/77; H01L21/8238; H01L21/84; H01L27/08; H01L27/092; H01L27/12; H01L29/786; H01L51/50; H01L27/32; H01L51/56; (IPC1-7): G09F9/30; G09F9/00; H01L21/336; H01L21/8238; H01L27/08; H01L27/092; H01L29/786; H05B33/10; H05B33/14
Domestic Patent References:
| JP2000216396A | ||||
| JP9326494A | ||||
| JP61183622A | ||||
| JP2000243721A | ||||
| JP2000031081A | ||||
| JP10161563A |
Attorney, Agent or Firm:
Takashi Watanabe
Masatake Shiga
Masatake Shiga