To provide a method for manufacturing a package, capable of efficiently manufacturing the package.
The method for manufacturing the package includes a through electrode formation step of forming a through electrode which penetrates a first substrate 40 in the thickness direction to conduct the inside of a cavity and the outside of a package, wherein the through electrode formation step includes: a through hole formation step of forming through holes 30, 31 on the first substrate 40; a stud arrangement step of inserting a core material part 7 of a conductive stud 9 having a planar foundation part 8, and a core material part 7 erected on the surface of the foundation part 8 into the through holes 30, 31. The core material part 7 is inserted into the through holes 30, 31 by forming the through holes 30, 31 in the inverse-tapered shape whose diameter is gradually extended from the side of a first surface 40a of the first substrate 40 toward the side of a second surface 40b opposite to the first surface 40a in the through hole formation step, and attracting the stud 9 from the side of the second surface 40b through the through holes 30, 31 while moving the stud 9 on the first surface 40a by turning the first surface 40a of the first substrate 40 upward in the stud arrangement step.
Numata, Satoshi
Fujimoto, Shuichi
Ezoe, Takashi
TOHEI SANGYO CO LTD
WESTEC:KK
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