Title:
METHOD OF MANUFACTURING PATTERN FORMING BODY, AND METHOD OF MANUFACTURING MOLD FOR NANO-PRINTING
Document Type and Number:
Japanese Patent JP2010094845
Kind Code:
A
Abstract:
To provide a method of manufacturing a pattern forming body capable of reducing deposition of a chipping or the like onto an irregular pattern part and corrosion thereof.
This method of manufacturing the pattern forming body includes a protection layer forming process for preparing a body to be worked having the irregular pattern part on a surface, and for forming a protection layer comprising a chromium material containing chromium nitride, as a main component, at least on the irregular pattern part, and a working process for working a portion of the body to be worked other than the irregular pattern part protected by the protection layer, and the problem to be solved is solved by the method.
Inventors:
ITO KIMIO
INAZUKI YUICHI
KURIHARA MASAAKI
INAZUKI YUICHI
KURIHARA MASAAKI
Application Number:
JP2008265701A
Publication Date:
April 30, 2010
Filing Date:
October 14, 2008
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
B29C33/38; B29C59/02; B81C99/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP2008262083A | 2008-10-30 | |||
| JP2008221516A | 2008-09-25 | |||
| JP2008217959A | 2008-09-18 | |||
| JPH07187678A | 1995-07-25 | |||
| JPH07118830A | 1995-05-09 | |||
| JP2008227135A | 2008-09-25 |
Attorney, Agent or Firm:
Akihiko Yamashita
Kishimoto Tatsuto
Kishimoto Tatsuto