Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD OF MANUFACTURING PELLICLE, AND PELLICLE
Document Type and Number:
Japanese Patent JP2013195852
Kind Code:
A
Abstract:

To improve film tension of a pellicle film without applying temperature change.

A method of manufacturing a pellicle includes: a first step of pasting a pellicle film 11 deposed on a substrate 30 and formed of a high polymer material to a frame body 20 having an opening so as to cover the opening surface thereof; a second step of peeling the pellicle film 11 pasted on the frame body 20 from the substrate 30; and a third step of pasting the pellicle film 11 on the frame body 20 to a pellicle frame 10 having an opening so as to cover the opening surface, in this order. At the first step, an external force toward the inside of the frame body 20 is applied to at least one side of the frame body 20, and then the pellicle film 11 is pasted to the frame body 20 in a state where the side of the frame body 20 is deformed to the inside thereof.


Inventors:
IWAMURA KENICHIRO
UCHIMURA HIROFUMI
TSUKAMOTO MASAHIRO
HIROSE TAKANORI
HIRANO MASAKATSU
Application Number:
JP2012064572A
Publication Date:
September 30, 2013
Filing Date:
March 21, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ASAHI KASEI E MATERIALS CORP
International Classes:
G03F1/62; G03F1/64
Domestic Patent References:
JP2006323178A2006-11-30
JP2005202011A2005-07-28
JPH10339944A1998-12-22
JPH0312245U1991-02-07
JP2005128512A2005-05-19
JP2011158585A2011-08-18
JP2001290259A2001-10-19
JP5641602B22014-12-17
JP2006323178A2006-11-30
JP2005202011A2005-07-28
JPH10339944A1998-12-22
JPH0312245U1991-02-07
Foreign References:
US20110189594A12011-08-04
US20010004508A12001-06-21
US20110189594A12011-08-04
US20010004508A12001-06-21
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito



 
Previous Patent: TONER, DEVELOPER, TONER CARTRIDGE, PROCESS CARTRIDGE, AND IMAGE FORMING APPARATUS

Next Patent: DUPLEX FLIP-UP SPECTACLES