To provide a method of manufacturing a perfluoroalkyl sulfonic acid metal salt, capable of simply and safely generating the perfluoroalkyl sulfonic acid metal salt with a very small amount of impurities and high purity.
A method of manufacturing a perfluoroalkyl sulfonic acid metal salt including a process of obtaining a perfluoroalkyl sulfonic acid solution by mixing the perfluoroalkyl sulfonic acid metal salt represented by the chemical formula (CnF2n+1SO3)m M1 and hydrochloric acid in an organic solvent, separating and eliminating a precipitated metal chloride M1Cl by a filtration, and concentrating the resultant filtrate to eliminate the organic solvent and a non-reacting hydrochloric acid, and a process of obtaining the perfluoroalkyl sulfonic acid metal salt represented by the chemical formula (CnF2n+1SO3)l M2, where M2≠M1 by reacting the perfluoroalkyl sulfonic acid solution and a metalhydroxide or metal carbonates.
HONDA TSUNETOSHI
MITSUBIHI MATERIALS ELECTRONIC CHEMICALS CO LTD
Tadashi Takahashi
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