To provide a method for manufacturing a phosphor panel which makes it possible to reduce impurities contained in a phosphor layer, is free from a deterioration in luminance caused by the impurities in the phosphor layer and enables the stable manufacture of a superluminescent and highly efficient phosphor panel in the manufacture of a phosphor panel where a phosphor layer is formed by vacuum evaporation.
In the manufacture of the phosphor panel where the phosphor layer is formed on a substrate by vacuum evaporation through resistance heating, the problem is solved by using a crucible made of tantalum as an evaporation source and setting the voltage applied to the crucible at 2.5 V or lower to deposit the phosphor layer.
COPYRIGHT: (C)2008,JPO&INPIT
KATAYAMA AKIO
KASHIWATANI MAKOTO
Haruko Sanwa
Hiroshi Fukushima