Title:
METHOD OF MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
Japanese Patent JP2015191931
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric conversion device capable of obtaining a high photoelectric conversion efficiency even when the photoelectric conversion device is produced with a large area.SOLUTION: A method of manufacturing a photoelectric conversion device 11 includes the following steps of: forming a membrane 3A containing a metal element on a principal surface of a lower electrode layer 2; arranging a lattice body 102 on which a chalcogen element is deposited on an extended line in a first direction parallel to the principal surface of the membrane 3A so that a deposition amount per unit region becomes larger as an average thickness of the membrane 3A in respective band-like regions obtained by dividing the membrane 3A into a plurality of band-like regions (3Aa, 3Ab, and 3Ac) extending in the first direction becomes larger; and applying an atmosphere gas G1 in the first direction so that the atmosphere gas G1 is transmitted through the lattice body 102 and reaches a surface of the membrane 3A while heating the lattice body 102 and the membrane 3A, and thereby, obtaining a semiconductor layer 3 that contains metal chalcogenide from the membrane 3A.
Inventors:
DOMOTO TATSUYA
MIYAMICHI YUSUKE
MIYAMICHI YUSUKE
Application Number:
JP2014066173A
Publication Date:
November 02, 2015
Filing Date:
March 27, 2014
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L31/0749; H01L31/18
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