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Patent Searching and Data


Title:
感光性樹脂組成物、レリーフパターンの製造法
Document Type and Number:
Japanese Patent JP4524808
Kind Code:
B2
Inventors:
Akihiro Sasaki
Application Number:
JP8866699A
Publication Date:
August 18, 2010
Filing Date:
March 30, 1999
Export Citation:
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Assignee:
Hitachi Chemical DuPont Micro Systems Co., Ltd.
International Classes:
C08L79/08; H01L21/027; C08G73/10; C08G73/22; C08L79/04; G03F7/004; G03F7/022; G03F7/027; G03F7/028; G03F7/037; G03F7/038; G03F7/40; H01L21/312
Domestic Patent References:
JP10326011A
JP10060067A
JP6343880A
JP2000143804A
JP11080354A
JP10324745A
Foreign References:
WO1998050371A1
Attorney, Agent or Firm:
Hiroaki Sakai
Yukihiko Takada
Masaru Takenouchi