Title:
感光性樹脂組成物、レリーフパターンの製造法
Document Type and Number:
Japanese Patent JP4524808
Kind Code:
B2
Inventors:
Akihiro Sasaki
Application Number:
JP8866699A
Publication Date:
August 18, 2010
Filing Date:
March 30, 1999
Export Citation:
Assignee:
Hitachi Chemical DuPont Micro Systems Co., Ltd.
International Classes:
C08L79/08; H01L21/027; C08G73/10; C08G73/22; C08L79/04; G03F7/004; G03F7/022; G03F7/027; G03F7/028; G03F7/037; G03F7/038; G03F7/40; H01L21/312
Domestic Patent References:
| JP10326011A | ||||
| JP10060067A | ||||
| JP6343880A | ||||
| JP2000143804A | ||||
| JP11080354A | ||||
| JP10324745A |
Foreign References:
| WO1998050371A1 |
Attorney, Agent or Firm:
Hiroaki Sakai
Yukihiko Takada
Masaru Takenouchi
Yukihiko Takada
Masaru Takenouchi