To provide a method of manufacturing a piezoelectric actuator capable of avoiding the formation of a piezoelectric layer on the surface of a recess formed on a diaphragm easily when forming the piezoelectric layer by an aerosol deposition method.
First, the recess 40 is formed at a position corresponding to a pressure chamber 14 on the upper surface of the diaphragm 30. Then, the recess 40 of the diaphragm 30 is filled with a fluid filler 50 having a modulus of elasticity lower than that of the diaphragm 30. Aerosol containing particles of piezoelectric materials and carrier gas is sprayed onto the upper surface of the diaphragm 30 to form a piezoelectric layer 31. In this case, no particles of piezoelectric materials adhere to the surface of the fluid filler 50 having a low modulus of elasticity filled into the recess 40, thus forming the piezoelectric layer 31 only at a region excluding the surface of the fluid filler 50 having a low modulus of elasticity.
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Makoto Suhara
Toru Kimura
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