To provide a method of manufacturing for a small piezoelectric sensor with high detecting sensitivity of angular acceleration and translational acceleration in high productivity.
A stacked body is obtained by stacking first and second piezoelectric members 100, 200 on each side of a supporting member 300. The supporting member 300 has a plurality of projection parts 301 formed in the same position on both surfaces in the thickness direction. Each of the projection parts 301 extends in a strip shape in the length direction L at intervals of width direction W. In the first and second piezoelectric members 100, 200, one end in the width direction W is bonded to one of adjacent two projection parts 301, the other end is extended in the opposite direction and separated at the distance SL1 from one of adjacent two projection parts 301. The stacked body is cut in the X direction perpendicularly crossing to the length direction L, and on the cut surface, cut treatment in the crossing two directions is conducted.
YAMAMOTO TAKASHI
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