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Title:
METHOD FOR MANUFACTURING PLASTIC BASE
Document Type and Number:
Japanese Patent JP2004299320
Kind Code:
A
Abstract:

To provide a method for manufacturing a plastic base capable of manufacturing the plastic base which can stably keep water repellency of the inner wall of a hole and the surface for a long time.

A bathtub part 20a is formed on a work holding stage 20 of an excimer laser processing apparatus, and its bottom face is coated with a laser reflecting layer 20b. After this bathtub part 20a is filled with a fluoro-compound solution S, a plastic base 100 being a work is placed on the work supporting part 20c immersed in the solution S, and the fluoro-compound solution S is placed between the laser reflecting layer 20b and the underside of the base. Then, the fluoro-compound solution S is frozen by a freezing chuck means, and the plastic base 100 frozen and fixed on the work holding stage 20 is irradiated with an excimer laser from its top face side to perform a hole processing.


Inventors:
KOBAYASHI TAKESHI
Application Number:
JP2003096783A
Publication Date:
October 28, 2004
Filing Date:
March 31, 2003
Export Citation:
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Assignee:
RICOH MICROELECTRONICS CO LTD
International Classes:
B41J2/135; B23K26/12; B23K26/382; B41C1/05; B41J2/16; (IPC1-7): B41C1/05; B23K26/00; B23K26/12; B41J2/135
Attorney, Agent or Firm:
Toshi Kuroda