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Title:
METHOD OF MANUFACTURING POLISHING PAD MOLDING DIE, POLISHING PAD MOLDING DIE MANUFACTURED BY THE SAME METHOD, AND POLISHING PAD MANUFACTURED BY THE SAME DIE
Document Type and Number:
Japanese Patent JP2014008693
Kind Code:
A
Abstract:

To provide a method of manufacturing a polishing pad molding die in which a polishing pad that performs a flattening work highly accurately and highly efficiently is manufactured, a polishing pad molding die manufactured by the method, and a polishing pad manufactured by the die.

A method of manufacturing a polishing pad molding die 10 for a polishing pad 13 on which a micro pattern α having fine protrusions 12 arranged thereon has: a master die fabrication process of fabricating a master die 26, on which a micro pattern β having an inverted concavo-convex relationship with the micro pattern α is formed, on one side of a substrate 21; a positive slave die fabrication process of fabricating a positive slave die 27, on the surface layer of which a micro pattern γ is formed, by using the master die 26; a negative slave die fabrication process of fabricating a negative slave die 18, on the surface layer of which a micro pattern δ is formed, by using the positive slave die 27; and an assembly process of arraying and fixing the negative slave die 18 on a base 17 while facing the surface layer on which the micro pattern δ is formed upward to constitute the polishing pad molding die 10.


Inventors:
TASHIRO YASUNORI
TAKADA MASATO
NAKA TOSHIAKI
MATSUO MASAAKI
ITO TAKAHIRO
SUZUKI YOSHITOMO
KIMURA KEIICHI
KHAJORNRUNGRUANG PANART
Application Number:
JP2012147442A
Publication Date:
January 20, 2014
Filing Date:
June 29, 2012
Export Citation:
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Assignee:
MISHIMA KOSAN CO LTD
KYUSHU INST TECHNOLOGY
International Classes:
B29C33/38; B24B37/26; C23F1/00; C25D1/00; C25D1/10; H01L21/304
Attorney, Agent or Firm:
Fujio Nakamae
Yohei Kiyoi
Yoshihiro Kurita
Takayuki Imanaka