Title:
METHOD FOR MANUFACTURING POLYURETHANE FOAM FOR POLISHING SHEET, POLYURETHANE FOAM, POLISHING SHEET, AND POLISHING PAD
Document Type and Number:
Japanese Patent JP3489828
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide a polishing sheet and a polishing pad which can effectively inhibit the formation of scratches, further a polyurethane foam to be used for the polishing sheet and the polishing pad, its manufacturing method, a method for manufacturing a semiconductor device and the like.
SOLUTION: The method for manufacturing the polyurethane foam for the polishing sheet comprises a step of mixing a first component containing an isocyanate group-containing compound with a second component containing an active hydrogen group-containing compound, and foreign substances present in the raw materials of both the above components are removed with the use of a ≥200 mesh filter (an opening of screen of ≤74 μm), and thereafter both the components are mixed.
Inventors:
Ogawa, Kazuyuki
Nakai, Yoshiyuki
Shimomura, Tetsuo
Nakamori, Masahiko
Yamada, Takatoshi
Nakai, Yoshiyuki
Shimomura, Tetsuo
Nakamori, Masahiko
Yamada, Takatoshi
Application Number:
JP2002000279363
Publication Date:
November 07, 2003
Filing Date:
September 25, 2002
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO LTD
TOYOBO CO LTD
TOYOBO CO LTD
International Classes:
B24B37/00; C08G18/06; C08G18/08; C08G18/09; C08J5/14; H01L21/304; C08G101/00; (IPC1-7): C08G18/09; B24B37/00; C08J5/14
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